Research Status and Development Trend of MEMS Switches: A Review

MEMS switch is a movable device manufactured by means of semiconductor technology, possessing many incomparable advantages such as a small volume, low power consumption, high integration, etc. This paper reviews recent research of MEMS switches, pointing out the important performance indexes and sys...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Tongtong Cao, Tengjiang Hu, Yulong Zhao
Format:	Article
Language:	English
Published:	MDPI AG 2020-07-01
Subjects:	MEMS switches driving principle reliability bistable mechanism
Online Access:	https://www.mdpi.com/2072-666X/11/7/694