Effect of pad and slurry on fixed abrasive polishing of gallium oxide crystal
Gallium oxide crystal is one of the most representative fourth generation semiconductor materials with the advantages of high band gap, high voltage resistance and short absorption cutoff edge. It has broad application prospects. Micro-cracks, scratches and other surface defects are prone to appear...
| الحاوية / القاعدة: | Jin'gangshi yu moliao moju gongcheng |
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| المؤلفون الرئيسيون: | , , , , |
| التنسيق: | مقال |
| اللغة: | الصينية |
| منشور في: |
Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd.
2022-12-01
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| الموضوعات: | |
| الوصول للمادة أونلاين: | http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2022.0043 |