Dependence of Structural Design on Effective Young's Modulus of Ti/Au Multi-layered Micro-cantilevers

Gold-based micro-electro-mechanical-systems (Au-MEMS) capacitive accelerometers can simultaneously realize high sensitivity and miniaturization because of the high mass density of Au. In order to further improve the sensitivity of the Au-MEMS capacitive accelerometers, Young's modulus of the ca...

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Bibliographic Details

Published in:	Micro and Nano Engineering
Main Authors:	Shunkai Watanabe, Tomoyuki Kurioka, Chun-Yi Chen, Tso-Fu Mark Chang, Akira Onishi, Parthojit Chakraborty, Katsuyuki Machida, Hiroyuki Ito, Yoshihiro Miyake, Masato Sone
Format:	Article
Language:	English
Published:	Elsevier 2024-06-01
Subjects:	MEMS Gold Size effect Effective Young's modulus Resonance frequency method FEA simulations
Online Access:	http://www.sciencedirect.com/science/article/pii/S2590007224000121