Study on Fabrication of ZnO Waveguide Layer for Love Wave Humidity Sensor Based on Magnetron Sputtering

The ZnO waveguide layer for the Love wave humidity sensor was fabricated by radio frequency (RF) magnetron sputtering technique using ZnO as the target material. To investigate the effect of RF magnetron sputtering temperature on the ZnO waveguide layer and Love wave device, a series of Love wave de...

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发表在:	Sensors
Main Authors:	Changbao Wen, Taotao Niu, Yue Ma, Nan Gao, Feng Ru
格式:	文件
语言:	英语
出版:	MDPI AG 2018-10-01
主题:	Love wave device humidity sensor ZnO waveguide layer magnetron sputtering
在线阅读:	http://www.mdpi.com/1424-8220/18/10/3384