Effect of elastomer materials on the time response characteristics of MEMS tactile sensors

We report on the effect of elastomer materials on the time response characteristics of tactile sensors using microcantilevers embedded in the elastomer. Our previous work has shown that different electrical time response characteristics of the sensor output can be obtained using piezoelectric or res...

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Bibliographic Details
Published in:Mechanical Engineering Journal
Main Authors: Yusaku AIBA, Ryusuke MITOBE, Akiyoshi KUSANO, Akiomi USHIDA, Takashi ABE, Masayuki SOHGAWA
Format: Article
Language:English
Published: The Japan Society of Mechanical Engineers 2025-06-01
Subjects:
tactile sensor
viscoelastic elastomer
microcantilever
time response characteristics
Online Access:https://www.jstage.jst.go.jp/article/mej/12/4/12_25-00098/_pdf/-char/en

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https://www.jstage.jst.go.jp/article/mej/12/4/12_25-00098/_pdf/-char/en

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