Structure аnd Physical-Mechanical Properties of nc-TiN Coatings Obtained by Vacuum-Arc Deposition and Deposition of HF Discharge

Using scanning electron microscopy (SEM), rengen-structural analysis (RSA), adhesion strength, friction coefficient and wear rate of the material and studied the properties of the coatings nc – TiN. Depending on the bias potential applied to the substrate and the chamber pressure, the inclusion of H...

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Bibliographic Details

Published in:	Журнал нано- та електронної фізики
Main Authors:	A.P. Sypylenko, R.Y. Tkachenko, G.V. Kirik, I.T. Karasha, A.M. Mahmud, A.D. Pogrebnyak
Format:	Article
Language:	English
Published:	Sumy State University 2011-01-01
Subjects:	nc-TiN Coatings SEM RSA Nanohardness Elastic modulus Adhesion Tribological and deformation characteristics.
Online Access:	http://jnep.sumdu.edu.ua/download/numbers/2011/4/articles/jnep_2011_V3_N4_097-105.pdf