A Sub-1 Hz Resonance Frequency Resonator Enabled by Multi-Step Tuning for Micro-Seismometer

We propose a sub-1 Hz resonance frequency MEMS resonator that can be used for seismometers. The low resonance frequency is achieved by an electrically tunable spring with an ultra-small spring constant. Generally, it is difficult to electrically fine-tune the resonance frequency at a near-zero sprin...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Jun Wu, Hideyuki Maekoba, Arnaud Parent, Tamio Ikehashi
Format:	Article
Language:	English
Published:	MDPI AG 2021-12-01
Subjects:	MEMS seismometer resonance frequency force-balanced electrical tuning
Online Access:	https://www.mdpi.com/2072-666X/13/1/63