High Anodic-Voltage Focusing of Charge Carriers in Silicon Enables the Etching of Regularly-Arranged Submicrometer Pores at High Density and High Aspect-Ratio
The anodic dissolution of silicon in acidic electrolytes is a well-known technology enabling the silicon machining to be accurately controlled down to the micrometer scale in low-doped n-type silicon electrodes. Attempts to scale down this technology to the submicrometer scale has shown to be challe...
| 發表在: | Frontiers in Chemistry |
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| Main Authors: | , , , |
| 格式: | Article |
| 語言: | 英语 |
| 出版: |
Frontiers Media S.A.
2018-11-01
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| 主題: | |
| 在線閱讀: | https://www.frontiersin.org/article/10.3389/fchem.2018.00582/full |