Design, Fabrication, and Dynamic Analysis of a MEMS Ring Resonator Supported by Twin Circular Curve Beams

In this paper, we present a compressive study on the design and development of a MEMS ring resonator and its dynamic behavior under electrostatic force when supported by twin circular curve beams. Finite element analysis (FEA)-based modeling techniques are used to simulate and refine the resonator g...

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Bibliographic Details
Published in:Sensors
Main Authors: Ahmad Rahbar Ranji, Gnanesh Nagesh, Fangyan Sun, Mohammed Jalal Ahamed
Format: Article
Language:English
Published: MDPI AG 2024-07-01
Subjects:
MEMS
dynamic analysis
electrostatic force
FEM
pull-in voltage
ring resonator
Online Access:https://www.mdpi.com/1424-8220/24/14/4499

Internet

https://www.mdpi.com/1424-8220/24/14/4499

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