Investigation of the machinability of (001) single-crystal β-Ga2O3 via tribological methodology
Gallium oxide (Ga2O3) is a promising material for next-generation power devices due to its ultrawide bandgap and extremely high critical electric field strength; however, the strong anisotropy and cleavage tendency of Ga2O3 pose significant challenges for high-precision surface processing. In this w...
| Published in: | Nanotechnology and Precision Engineering |
|---|---|
| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-09-01
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| Online Access: | http://dx.doi.org/10.1063/5.0253608 |