Investigation of the machinability of (001) single-crystal β-Ga2O3 via tribological methodology

Gallium oxide (Ga2O3) is a promising material for next-generation power devices due to its ultrawide bandgap and extremely high critical electric field strength; however, the strong anisotropy and cleavage tendency of Ga2O3 pose significant challenges for high-precision surface processing. In this w...

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Bibliographic Details
Published in:	Nanotechnology and Precision Engineering
Main Authors:	Shuo Li, Peng Gao, Guosong Zeng
Format:	Article
Language:	English
Published:	AIP Publishing LLC 2025-09-01
Online Access:	http://dx.doi.org/10.1063/5.0253608

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