Flexible Thin-Film PZT Ultrasonic Transducers on Polyimide Substrates

We report flexible thin-film lead zirconate titanate (PZT)-based ultrasonic transducers on polyimide substrates. The transducers are bar resonators designed to operate in the width extension mode. The active elements are 1 µm thick PZT films that were crystallized on Si substrates at 700 °C and tran...

詳細記述

書誌詳細

出版年:	Sensors
主要な著者:	Tianning Liu, Ajay Dangi, Jeong Nyeon Kim, Sri-Rajasekhar Kothapalli, Kyusun Choi, Susan Trolier-McKinstry, Thomas Jackson
フォーマット:	論文
言語:	英語
出版事項:	MDPI AG 2021-02-01
主題:	flexible transducer PZT pMUT thin-film transducer flexible PZT flexible pMUT solution-cast polyimide
オンライン･アクセス:	https://www.mdpi.com/1424-8220/21/3/1014