Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane

The extreme ultraviolet (EUV) pellicle is a freestanding membrane that protects EUV masks from particle contamination during EUV exposure. Although a high EUV transmittance of the pellicle is required to minimize the loss of throughput, the degradation of EUV transmittance during the extended exposu...

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Bibliographic Details

Published in:	Membranes
Main Authors:	Seong Ju Wi, Yong Ju Jang, Dong Gi Lee, Seon Yong Kim, Jinho Ahn
Format:	Article
Language:	English
Published:	MDPI AG 2022-12-01
Subjects:	EUV pellicle EUV transmittance oxidation sputtering microstructure diffusion
Online Access:	https://www.mdpi.com/2077-0375/13/1/5