A resonant high-pressure microsensor based on a composite pressure-sensitive mechanism of diaphragm bending and volume compression
Abstract In this paper, a composite pressure-sensitive mechanism combining diaphragm bending and volume compression was developed for resonant pressure microsensors to achieve high-pressure measurements with excellent accuracy. The composite mechanism was explained, and the sensor structure was desi...
| Published in: | Microsystems & Nanoengineering |
|---|---|
| Main Authors: | , , , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2024-03-01
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| Online Access: | https://doi.org/10.1038/s41378-024-00667-8 |