Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration

The paper deals with cantilevers made from monocrystalline silicon by processes of microtechnology. The cantilevers are passive structures and have no transducers. The application as a material measure for the inspection of stylus forces is in the center of investigations. A simple method is the mea...

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發表在:	Sensors
Main Authors:	Joachim Frühauf, Eva Gärtner, Zhi Li, Lutz Doering, Jan Spichtinger, Gerd Ehret
格式:	Article
語言:	英语
出版:	MDPI AG 2022-08-01
主題:	silicon cantilever elastic bending tactile profilometer stylus force measurement interferometric nano-topography measurement surface stress
在線閱讀:	https://www.mdpi.com/1424-8220/22/16/6253