Design, simulation, and testing of a tunable MEMS multi-threshold inertial switch

Abstract This paper presents a tunable multi-threshold micro-electromechanical inertial switch with adjustable threshold capability. The demonstrated device combines the advantages of accelerometers in providing quantitative acceleration measurements and g-threshold switches in saving power when in...

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Bibliographic Details

Published in:	Microsystems & Nanoengineering
Main Authors:	Qiu Xu, Rodrigo T. Rocha, Yousef Algoos, Eric Feron, Mohammad I. Younis
Format:	Article
Language:	English
Published:	Nature Publishing Group 2024-03-01
Online Access:	https://doi.org/10.1038/s41378-024-00662-z