Failure Detection and Primary Cause Identification of Multivariate Time Series Data in Semiconductor Equipment

Downtime caused by equipment failure is the biggest productivity problem in the 24-hour a day operations of the semiconductor industry. Although some equipment failures are inevitable, increases in productivity can be gained if the causes of failures can be detected quickly and repaired, thus reduci...

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Bibliographic Details

Published in:	IEEE Access
Main Authors:	Minjae Baek, Seoung Bum Kim
Format:	Article
Language:	English
Published:	IEEE 2023-01-01
Subjects:	Anomaly detection explainable artificial intelligence multivariate time series semiconductor process signature matrix
Online Access:	https://ieeexplore.ieee.org/document/10138539/