Temperature drift suppression for micro‐electro‐mechanical system gyroscope based on vibrational‐displacement control with harmonic amplitude ratio

Abstract Micro‐electro‐mechanical system gyroscope detection output is susceptible to drift due to ambient temperature variations. Furthermore, the drive‐mode vibration amplitude is affected by the signal pickup circuit and structural parameters, which significantly influence the temperature drift o...

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Bibliographic Details
Published in:Micro & Nano Letters
Main Authors: Feng Bu, Rui Feng, Shuwen Guo, Ming Zhou, Yiwang Wang, Feng Wang
Format: Article
Language:English
Published: Wiley 2024-01-01
Subjects:
Online Access:https://doi.org/10.1049/mna2.12187