Steady-State and Transient Response of a Micromechanical Broadband Shoaling Amplifier

An in-plane MEMS broadband shoaling motion amplitude amplifier based on a coupled mass-spring system is presented. It is shown how the amplification amplitude can be traded for the operational bandwidth by design. Three devices with different numbers of masses (three, five and seven), but all of the...

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Bibliographic Details

Published in:	Proceedings
Main Authors:	Michelle Müller, Verena Maiwald, Cosmin Roman, Christofer Hierold
Format:	Article
Language:	English
Published:	MDPI AG 2017-09-01
Subjects:	coupled mass-spring system micromechanical amplifier broadband shoaling acoustic emission sensing
Online Access:	https://www.mdpi.com/2504-3900/1/4/352