Evaluation of Vertical Coherence Length, Twist and Microstrain of GaAs / Si Epilayers Using Modified Williamson-Hall Analysis

Modified Williamson-Hall (WH) analysis is used to determine the reliable values of the microstructures for Zincblende epilayers grown on non-polar substrates. Systematic high resolution X-ray diffraction (HRXRD) experiments are performed for several skew symmetric reflections which enable an accurat...

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Bibliographic Details

Published in:	Журнал нано- та електронної фізики
Main Authors:	Ravi Kumar, Tapas Ganguli, Vijay Chouhan, V.K. Dixit, Puspen Mondal, A.K. Srivastava, C. Mukherjee, T.K. Sharma
Format:	Article
Language:	English
Published:	Sumy State University 2014-06-01
Subjects:	HRXRD GaAs / Si Anti Phase domain Microstructure Williamson-Hall analysi
Online Access:	http://jnep.sumdu.edu.ua/download/numbers/2014/2/articles/jnep_2014_V6_02010.pdf