Marangoni-driven deterministic formation of softer, hollow microstructures for sensitivity-enhanced tactile system
Abstract Microengineering the dielectric layers with three-dimensional microstructures has proven effective in enhancing the sensitivity of flexible pressure sensors. However, the widely employed geometrical designs of solid microstructures exhibit limited sensitivity over a wide range of pressures...
| Published in: | Nature Communications |
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| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2024-07-01
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| Online Access: | https://doi.org/10.1038/s41467-024-49864-z |