Fabrication and Characterization of a PZT-Based Touch Sensor Using Combined Spin-Coating and Sputtering Methods

This study presents the successful fabrication of lead zirconate titanate (PZT) thin films on silicon (Si) substrates using a hybrid deposition method combining spin-coating and RF sputtering techniques. Initially, a PZT layer was deposited through four successive spin-coating cycles, followed by an...

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Bibliographic Details
Published in:Sensors
Main Authors: Melih Ozden, Omer Coban, Tevhit Karacali
Format: Article
Language:English
Published: MDPI AG 2025-06-01
Subjects:
lead zirconate titanate (PZT)
spin-coating
RF sputtering
hybrid deposition
touch sensor
BVD model
Online Access:https://www.mdpi.com/1424-8220/25/13/3938

Internet

https://www.mdpi.com/1424-8220/25/13/3938

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