Guided-wave photodetectors in germanium on optical chips in silicon-on-insulator
We report the integration of near-infrared waveguide photodetectors in polycrystalline Germanium with Silicon on Insulator optical chips for power monitor applications. We discuss design and fabrication of the devices as well as their characterization in terms of dark current, responsivity and signa...
| 出版年: | Journal of the European Optical Society-Rapid Publications |
|---|---|
| 主要な著者: | , , , , , |
| フォーマット: | 論文 |
| 言語: | 英語 |
| 出版事項: |
EDP Sciences
2009-01-01
|
| 主題: | |
| オンライン･アクセス: | https://jeos.edpsciences.org/articles/jeos/pdf/2009/01/jeos20090409030.pdf |