An Experimental Study on Fabricating an Inverted Mesa-Type Quartz Crystal Resonator Using a Cheap Wet Etching Process

In this study, a miniaturized high fundamental frequency quartz crystal microbalance (QCM) is fabricated for sensor applications using a wet etching technique. The vibration area is reduced in the fabrication of the high frequency QCM with an inverted mesa structure. To reduce the complexity of the...

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Bibliographic Details

Published in:	Sensors
Main Authors:	Xuefeng Li, Toshitsugu Ueda, Jing Zhang, Tian Zhang, Jia Huang, Jinxing Liang
Format:	Article
Language:	English
Published:	MDPI AG 2013-09-01
Subjects:	quartz crystal microbalance high fundamental frequency wet etching process rectangle high Q value
Online Access:	http://www.mdpi.com/1424-8220/13/9/12140