Bifurcation Analysis on the Periodic Response of a Comb Drive MEMS Resonator

In this paper, we investigate the bifurcation characteristics of a comb drive MEMS resonator. The method of averaging and the residue theorem are used to get a more accurate analytical solution for the periodic response. Then, the singularity theory is employed to give the transition sets on the DC-...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Huabiao Zhang, Lijuan Zhang, Xinye Li, Dongai Wang, Tingting Liu
Format:	Article
Language:	English
Published:	MDPI AG 2022-01-01
Subjects:	comb drive resonator bifurcation periodic response the method of averaging the singularity theory
Online Access:	https://www.mdpi.com/2072-666X/13/2/148