Growing and polishing methods aiming at CVD diamond wafer over 10-inch

Flat-surfaced and large-size diamond wafers are essential for industrial applications, analogous to silicon (Si) wafers over 10-inch. A promising approach for the industrial-scale production of large-size diamond wafers involves chemical vapor deposition (CVD) techniques that generate large-area pla...

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Bibliographic Details

Published in:	Functional Diamond
Main Authors:	Haochen Zhang, Zengyu Yan, Hanxu Zhang, Guangchao Chen
Format:	Article
Language:	English
Published:	Taylor & Francis Group 2025-12-01
Subjects:	cvd diamond wafer growing polishing miep
Online Access:	http://dx.doi.org/10.1080/26941112.2025.2523762