Technologies for Fabricating Large-Size Diffraction Gratings

Large-size diffraction gratings have played an important role in modern scientific fields such as inertial confinement fusion, large-aperture astronomical telescopes, and high-precision immersion lithography machines with long-stroke displacement stages. However, due to the large size and high accur...

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Bibliographic Details

Published in:	Sensors
Main Authors:	Changfeng Shao, Xinghui Li
Format:	Article
Language:	English
Published:	MDPI AG 2025-03-01
Subjects:	large diffraction gratings tiled gratings grating ruling engines laser interference lithography fringe-locking technologies optical mosaic gratings
Online Access:	https://www.mdpi.com/1424-8220/25/7/1990