Dynamic Modeling, Simulation, and Experimental Verification of a Wafer Handling SCARA Robot With Decoupling Servo Control

In this paper, we propose a novel coordinated control method based on decoupling servo control to design a 4-DOF direct-drive SCARA robot for wafer handling purpose. As the basis of decoupling servo control, the dynamic model of the SCARA robot is obtained with two methods, the Newton-Euler equation...

وصف كامل

التفاصيل البيبلوغرافية
الحاوية / القاعدة:IEEE Access
المؤلفون الرئيسيون: Yunbo He, Xiquan Mai, Chengqiang Cui, Jian Gao, Zhijun Yang, Kai Zhang, Xun Chen, Yun Chen, Hui Tang
التنسيق: مقال
اللغة:الإنجليزية
منشور في: IEEE 2019-01-01
الموضوعات:
Decoupling control
direct-drive
wafer handling
SCARA robot
الوصول للمادة أونلاين:https://ieeexplore.ieee.org/document/8682121/

الانترنت

https://ieeexplore.ieee.org/document/8682121/

مواد مشابهة