Dynamic Modeling, Simulation, and Experimental Verification of a Wafer Handling SCARA Robot With Decoupling Servo Control

In this paper, we propose a novel coordinated control method based on decoupling servo control to design a 4-DOF direct-drive SCARA robot for wafer handling purpose. As the basis of decoupling servo control, the dynamic model of the SCARA robot is obtained with two methods, the Newton-Euler equation...

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Bibliographic Details
Published in:	IEEE Access
Main Authors:	Yunbo He, Xiquan Mai, Chengqiang Cui, Jian Gao, Zhijun Yang, Kai Zhang, Xun Chen, Yun Chen, Hui Tang
Format:	Article
Language:	English
Published:	IEEE 2019-01-01
Subjects:	Decoupling control direct-drive wafer handling SCARA robot
Online Access:	https://ieeexplore.ieee.org/document/8682121/

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