Non-Contact Optical Detection of Foreign Materials Adhered to Color Filter and Thin-Film Transistor

This paper describes the non-contact optical detection of debris material that adheres to the substrates of color filters (CFs) and thin-film transistors (TFTs) by area charge-coupled devices (CCDs) and laser sensors. One of the optical detections is a side-view illumination by an area CCD that emit...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Fu-Ming Tzu, Shih-Hsien Hsu, Jung-Shun Chen
Format:	Article
Language:	English
Published:	MDPI AG 2022-01-01
Subjects:	foreign material laser sensor area charge-coupled device color filter thin-film transistor
Online Access:	https://www.mdpi.com/2072-666X/13/1/101