Simulation of film bulk acoustic resonator based on two-dimensional phononic crystals

Show other versions (1)

A new structure of film bulk acoustic resonator (FBAR) based on phononic crystal (PnC) was proposed.The phononic crystal was used as the acoustic reflection layer at the bottom of the bulk acoustic wave resonator, which has the characteristics of high reflectivity and low transmittance of elastic wa...

Full description

Bibliographic Details
Published in:物联网学报
Main Authors: Linhao SHI, Weipeng XUAN, Lingling SUN, Shurong DONG, Hao JIN, Jikui LUO
Format: Article
Language:Chinese
Published: China InfoCom Media Group 2022-03-01
Subjects:
film bulk acoustic resonator
high reflectivity
phononic crystal
finite element analysis
Online Access:http://www.wlwxb.com.cn/zh/article/doi/10.11959/j.issn.2096-3750.2022.00251/

Internet

http://www.wlwxb.com.cn/zh/article/doi/10.11959/j.issn.2096-3750.2022.00251/

Similar Items