Atomic Layer Assembly Based on Sacrificial Templates for 3D Nanofabrication

Three-dimensional (3D) nanostructures have attracted widespread attention in physics, chemistry, engineering sciences, and biology devices due to excellent functionalities which planar nanostructures cannot achieve. However, the fabrication of 3D nanostructures is still challenging at present. Relia...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Guangzhou Geng, Zhongshan Zhang, Chensheng Li, Ruhao Pan, Yunlong Li, Haifang Yang, Junjie Li
Format:	Article
Language:	English
Published:	MDPI AG 2022-05-01
Subjects:	atomic layer deposition sacrificial templates 3D nanostructures
Online Access:	https://www.mdpi.com/2072-666X/13/6/856