Proposals for Next-Generation Eco-Friendly Non-Flammable Refrigerants for a −100 °C Semiconductor Etching Chiller Based on 4E (Energy, Exergy, Environmental, and Exergoeconomic) Analysis

Recent advancements in cryogenic etching, characterized by high aspect ratios and etching rates, address the growing demand for enhanced performance and reduced power consumption in electronics. To precisely maintain the temperature under high loads, the cascade mixed-refrigerant cycle (CMRC) is pre...

Full description

Bibliographic Details

Published in:	Energies
Main Authors:	Hye-In Jung, Chang-Hyo Son, Joon-Hyuk Lee
Format:	Article
Language:	English
Published:	MDPI AG 2024-10-01
Subjects:	mixed refrigerant ultra-low temperature cascade refrigeration eco-friendly krypton semiconductor processing
Online Access:	https://www.mdpi.com/1996-1073/17/19/4969