Grooving and Absorption on Substrates to Reduce the Bulk Acoustic Wave for Surface Acoustic Wave Micro-Force Sensors

Improving measurement accuracy is the core issue with surface acoustic wave (SAW) micro-force sensors. An electrode transducer can stimulate not only the SAW but also the bulk acoustic wave (BAW). A portion of the BAW can be picked up by the receiving transducer, leading to an unwanted or spurious s...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Yang Feng, Haoda Yu, Wenbo Liu, Keyong Hu, Shuifa Sun, Zhen Yang, Ben Wang
Format:	Article
Language:	English
Published:	MDPI AG 2024-05-01
Subjects:	surface acoustic wave (SAW) micro-force sensor bulk acoustic wave (BAW)
Online Access:	https://www.mdpi.com/2072-666X/15/5/637