Study on the Surface Generation Mechanism during Ultra-Precision Parallel Grinding of SiC Ceramics

Silicon carbide (SiC) is a typical, difficult-to-machine material that has been widely used in the fabrication of optical elements and structural and heat-resistant materials. Parallel grinding has been frequently adopted to produce a high-quality surface finish. Surface generation is a vital issue...

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Bibliographic Details

Published in:	Crystals
Main Authors:	Shanshan Chen, Shuming Yang, Chi Fai Cheung, Tao Liu, Duanzhi Duan, Lai-ting Ho, Zhuangde Jiang
Format:	Article
Language:	English
Published:	MDPI AG 2023-04-01
Subjects:	parallel grinding phase shift SiC ceramics surface generation vibration pattern ultra-precision machining
Online Access:	https://www.mdpi.com/2073-4352/13/4/646