Superconducting Tunable Microstrip Gap Resonators Using Low Stress RF MEMS Fabrication Process
A Nb superconducting tunable microstrip gap resonator has been designed and fabricated with low stress Au RF MEMS dc-contact switches. The resonator can be tuned in four states from 12-15 GHz. Simulations show that the resonator Q is highly sensitive to the contact resistance of the MEMS when the sw...
| الحاوية / القاعدة: | IEEE Journal of the Electron Devices Society |
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| المؤلفون الرئيسيون: | , |
| التنسيق: | مقال |
| اللغة: | الإنجليزية |
| منشور في: |
IEEE
2017-01-01
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| الموضوعات: | |
| الوصول للمادة أونلاين: | https://ieeexplore.ieee.org/document/7935538/ |