Light Extraction Enhancement of InGaN Based Micro Light-Emitting Diodes with Concave-Convex Circular Composite Structure Sidewall

We demonstrate that the concave-convex circular composite structure sidewall prepared by inductively coupled plasma (ICP) etching is an effective approach to increase the light efficiency without deteriorating the electrical characteristics for micro light-emitting diodes (LEDs). The saturated light...

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Bibliographic Details

Published in:	Applied Sciences
Main Authors:	Lijun Tan, Quanbin Zhou, Wenlong Hu, Hong Wang, Ruohe Yao
Format:	Article
Language:	English
Published:	MDPI AG 2019-08-01
Subjects:	InGaN/GaN micro-LEDs concave-convex circular composite structure sidewall ICP light extraction efficiency
Online Access:	https://www.mdpi.com/2076-3417/9/17/3458