Analysis of Distortion Based on 2D MEMS Micromirror Scanning Projection System

To analyze the distortion problem of two-dimensional micro-electromechanical system (MEMS) micromirror in-plane scanning, this paper makes a full theoretical analysis of the distortion causes from many aspects. Firstly, the mathematical relations among the deflection angle, laser incidence angle, an...

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Bibliographic Details
Published in:Micromachines
Main Authors: Xichen Wang, Yingke Xie, Hengheng Liang, Nianbing Zhong
Format: Article
Language:English
Published: MDPI AG 2021-07-01
Subjects:
2D MEMS micromirror
distortion
scanning projection
Online Access:https://www.mdpi.com/2072-666X/12/7/818

Internet

https://www.mdpi.com/2072-666X/12/7/818

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