Fabry–Perot Interferometer Used to Measure Very Low Static Pressure Measurements

This paper describes the use of an optical instrument, the Fabry–Perot interferometer, adapted to measure very low pressures. The interferometer consists of two high-reflectance flat mirrors placed one in front of another. In addition, a metallic chamber contains air or a gas. In one of the faces of...

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Bibliographic Details

Published in:	Sensors
Main Authors:	Sergio Calixto, Roberto Zitzumbo, Zacarías Malacara Hernandez
Format:	Article
Language:	English
Published:	MDPI AG 2023-07-01
Subjects:	sensor devices pressure sensor physical sensor optical sensor Fabry–Perot interferometer polydimethyl siloxane
Online Access:	https://www.mdpi.com/1424-8220/23/14/6493