Structural Engineering of Multilayer TiN / CrN System Obtained by the Vacuum Arc Evaporation

By the X-ray diffraction, electron microscopy, and microindentation methods we have investigated the phase composition, structure, substructure and hardness of vacuum arc multilayer coatings of TiN / CrN system obtained in the range of nitrogen pressure of 1×10–5 ... 5×10–3 Torr when applying contin...

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Bibliographic Details

Published in:	Журнал нано- та електронної фізики
Main Authors:	O.V. Sobol’, A.A. Andreev, V.A. Stolbovoy, V.F. Gorban’, N.V. Pinchuk, A.A. Meylekhov
Format:	Article
Language:	English
Published:	Sumy State University 2015-03-01
Subjects:	Vacuum-arc method Pressure Bias potential CrN TiN Texture Substructure Microstrain Size of crystallite
Online Access:	http://jnep.sumdu.edu.ua/download/numbers/2015/1/articles/jnep_2015_V7_01034.pdf