Hybrid Reflective Interferometric System Combining Wide-Field and Single-Point Phase Measurements

We present a hybrid scan-free reflective interferometric system, which combines a wide-field phase measurement, together with a single-point phase measurement, for optical inspection of thin reflective elements. The wide-field interferometric system is composed of a compact portable off-axis interfe...

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Bibliographic Details

Published in:	IEEE Photonics Journal
Main Authors:	Reut Friedman, Natan T. Shaked
Format:	Article
Language:	English
Published:	IEEE 2015-01-01
Subjects:	Digital holography Holographic interferometry Phase measurement Optical inspection
Online Access:	https://ieeexplore.ieee.org/document/7089168/