UV-LED Photo-Activated Room Temperature NO2 Sensors Based on Nanostructured ZnO/AlN Thin Films

UV-light emitting diodes (395–278 nm) were used to investigate the gas sensing attributes of planar and nanostructured ZnO/AlN thin films on Si substrate towards NO<sub>2</sub> at room temperature. A significant increased sensitivity ((<i>R</i>g − <i>R</i>a)/<i...

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Bibliographic Details
Published in:Proceedings
Main Authors: Tony Granz, Marius Temming, Jiushuai Xu, Qomaruddin, Cristian Fabrega, Nurhalis Majid, Gerhard Lilienkamp, Winfried Daum, Erwin Peiner, Joan Daniel Prades, Andreas Waag, Hutomo Suryo Wasisto
Format: Article
Language:English
Published: MDPI AG 2019-02-01
Subjects:
gas sensor
ZnO nanowire
nanostructure
photo-activation
AlN-on-Si
NO2 detection
Online Access:https://www.mdpi.com/2504-3900/2/13/888

Internet

https://www.mdpi.com/2504-3900/2/13/888

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