Femtosecond Laser Processing of Membranes for Sensor Devices on different Bulk Materials

We demonstrate that diaphragms for sensor applications can be fabricated by laser ablation in a~variety of substrates such as ceramics, glass, sapphire or SiC. However, ablation can cause pinholes in membranes made of SiC, Si and metals. Our experiments indicate that pinhole defects in the ablated m...

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Bibliographic Details

Published in:	Advances in Electrical and Electronic Engineering
Main Authors:	Johann Zehetner, Gabriel Vanko, Jaroslav Dzuba, Tibor Lalinsky
Format:	Article
Language:	English
Published:	VSB-Technical University of Ostrava 2017-01-01
Subjects:	algan/gan hemt diaphragms laser ablation lipss sic mems slot waveguide.
Online Access:	http://advances.utc.sk/index.php/AEEE/article/view/2033