Post-Processing Trimming of Silicon Photonic Devices Using Femtosecond Laser

Fabrication errors inevitably occur in device manufacturing owing to the limited processing accuracy of commercial silicon photonic processes. For silicon photonic devices, which are mostly processing-sensitive, their performances usually deteriorate significantly. This remains an unsolved issue for...

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Bibliographic Details

Published in:	Nanomaterials
Main Authors:	Yating Wu, Hongpeng Shang, Xiaorui Zheng, Tao Chu
Format:	Article
Language:	English
Published:	MDPI AG 2023-03-01
Subjects:	integrated photonics fabrication error compensation femtosecond laser cladding micro-ring Mach-Zehnder interferometer
Online Access:	https://www.mdpi.com/2079-4991/13/6/1031