Influence factors and temperature reliability of ohmic contact on AlGaN/GaN HEMTs

In this paper, we have studied the performance of Ti/Al/Ni/Au ohmic contact with different Al and Au thicknesses and pretreatments. The temperature dependence of contact resistances (Rc) was investigated and it shows that there are different optimal annealing temperatures with different metal thickn...

Full description

Bibliographic Details

Published in:	AIP Advances
Main Authors:	Liang Song, Kai Fu, Jie Zhao, Guohao Yu, Ronghui Hao, Xiaodong Zhang, Fu Chen, Yaming Fan, Yong Cai, Baoshun Zhang
Format:	Article
Language:	English
Published:	AIP Publishing LLC 2018-03-01
Online Access:	http://dx.doi.org/10.1063/1.5024803