Fabrication of MEMS-based 3D-μECoG-MEAs
The microfabrication and packaging of novel, three-dimensional, polyimide-based, highly flexible, microscale electrocorticography multi-electrode arrays for enhanced epicortical recording of local field potentials is presented. A polyimide foil embeds metallic structures relating to 32 taper-type el...
| Published in: | Current Directions in Biomedical Engineering |
|---|---|
| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2016-09-01
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| Subjects: | |
| Online Access: | https://doi.org/10.1515/cdbme-2016-0021 |