Fabrication of MEMS-based 3D-μECoG-MEAs

The microfabrication and packaging of novel, three-dimensional, polyimide-based, highly flexible, microscale electrocorticography multi-electrode arrays for enhanced epicortical recording of local field potentials is presented. A polyimide foil embeds metallic structures relating to 32 taper-type el...

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Bibliographic Details
Published in:	Current Directions in Biomedical Engineering
Main Authors:	Deckert Martin, Lippert Michael, Takagaki Kentaroh, Brose Andreas, Ohl Frank, Schmidt Bertram
Format:	Article
Language:	English
Published:	De Gruyter 2016-09-01
Subjects:	electrocorticography microelectrode polyimide snr three-dimensional
Online Access:	https://doi.org/10.1515/cdbme-2016-0021

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