Monolithically integrated triaxial high-performance micro accelerometers with position-independent pure axial stressed piezoresistive beams
Abstract With the increasing demand for multidirectional vibration measurements, traditional triaxial accelerometers cannot achieve vibration measurements with high sensitivity, high natural frequency, and low cross-sensitivity simultaneously. Moreover, for piezoresistive accelerometers, achieving p...
| الحاوية / القاعدة: | Microsystems & Nanoengineering |
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| المؤلفون الرئيسيون: | , , , , , , , , , , |
| التنسيق: | مقال |
| اللغة: | الإنجليزية |
| منشور في: |
Nature Publishing Group
2023-01-01
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| الوصول للمادة أونلاين: | https://doi.org/10.1038/s41378-022-00474-z |