Composition analysis of β-(InxGa1-x)2O3 thin films coherently grown on (010) β-Ga2O3 via mist CVD

This study investigates the compositional analysis and growth of β-(InxGa1-x)2O3 thin films on (010) β-Ga2O3 substrates using mist chemical vapor deposition (CVD), including the effects of the growth temperature. We investigated the correlation between In composition and b-axis length in coherently...

Full description

Bibliographic Details
Published in:Science and Technology of Advanced Materials
Main Authors: Hiroyuki Nishinaka, Yuki Kajita, Shoma Hosaka, Hiroki Miyake
Format: Article
Language:English
Published: Taylor & Francis Group 2024-12-01
Subjects:
Ga2O3
In2O3
alloying
coherent growth
epitaxial growth
mist CVD
Online Access:https://www.tandfonline.com/doi/10.1080/14686996.2024.2414733

Internet

https://www.tandfonline.com/doi/10.1080/14686996.2024.2414733

Similar Items