Transfer-free rapid growth of 2-inch wafer-scale patterned graphene as transparent conductive electrodes and heat spreaders for GaN LEDs

Abstract A technique for the transfer-free growth of 2-inch wafer-scale patterned graphene directly on GaN LED epilayers is introduced. High-quality graphene as transparent electrodes and heat spreaders is synthesized directly on GaN by PECVD at only 600 °C deposition temperature and within 3 min gr...

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Bibliographic Details

Published in:	npj 2D Materials and Applications
Main Authors:	Fangzhu Xiong, Jie Sun, Penghao Tang, Weiling Guo, Yibo Dong, Zaifa Du, Shiwei Feng, Xuan Li
Format:	Article
Language:	English
Published:	Nature Portfolio 2023-10-01
Online Access:	https://doi.org/10.1038/s41699-023-00434-9